VMZ-K3040

VMZ-K6555

XY Stroke (mm)

300×400

650×550

Magni?cation (Type S)

1.5× / 3× / 7.5×

1.5× / 3× / 7.5×

Magni?cation (Type H)

15× / 30×

15× / 30×

Z-axis Stroke (mm)

150

150

Max. guaranteed loading capacity (kg)

20

30

Max. permissible error U1X, U1Y (μm)

1.5+2.5L / 1000

1.5+2.5L / 1000

Max. permissible error of Z axis (μm)

1+L / 1000

1+L / 1000

Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of ?ne three-dimensional geometries.

• High Contrast and Multileveled Sample (PCBs)

Bright?eld observation can sometimes be dif?cult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics. 

• Thin Transparent Samples (Metal Surface Film / Semiconductor Resist)

Top layers of both thin transparent ?lm and metal surface can be easily detected using Confocal optics.